This specialized equipment is primarily developed to the laser direct writing requirements of optical waveguides. It is equipped with a high-quality laser micro-nano processing system, utilizing a high-quality, high-magnification focusing lens to tightly focus femtosecond laser beams, thereby achieving a nanoscale focal spot. This enables precision processing at the nanometer level, making it suitable for applications such as laser direct writing of optical waveguides and micro-nano processing on the surfaces of various thin-film materials.

Application: 

laser direct writing of optical waveguides and micro-nano processing on the surfaces of various thin-film materials.

High machining accuracy : 

≤ ± 200nm

Good quality : 

no taper & no burrs & high roundness

·   Surface and volume micro- and nano- structuring

·   Laser drilling

·  Direct laser writing (DLW)

·  A perfect choice  for various thin-film materials

·  Fabrication of complex objects with submicron resolution

·  With a smallest feature size of 200 nm

·  3D micromachining of curved surfaces

·  High-speed and ultra-high precision micromachining

·  Efficient beam delivery and power control

·  High-end industrial-grade femtosecond laser

·  High-performance galvanometer scanners